October 19, 2010 9:00 - 17:00
Empa, Dübendorf, Room MO 235
The course will provide participants with a systematic overview on the established and emerging concepts related to nanofabrication and nanoanalysis with focused charged particle beams (electrons and ions). Enabling microscope integrated equipments for nanomanipulation, minimally-invasive deposition and etching, electronic and magnetic measurements, mechanical characterisation, and compositional and structural characterisation will be introduced. The strengths and weaknesses of all methods will be discussed, enabling the participants to make decisions on new nanoscale fabrication and analysis processes and possible equipment acquisitions.