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Topic

Dual SEM/FIB device are becoming increasingly common and popular as they allow sophisticated multi-modal imaging and analysis/characterisation of nano- and micro-structured materials. The aim of the course is to present the extended analytical possibilities with such device, by combining several excitation probes and signal detectors on a common instrument chamber. The instrumentation suite we present combines the excitation techniques of an electron microscope, a focused ion beam microscope, a collimated X-ray source and a laser beam together with various detectors to allow imaging and measurement techniques such as EDS, WDS, TOF-SIMS, EBSD and XRF.

The following subjects will be presented during the course:

• Introduction to the different analytical techniques in SEM and FIB
• Imaging with SEM and FIB: SE, BSE and ion channeling contrast
• Advanced microstructure investigation with EBSD and transmission EBSD orientation mapping
• EBSD strain and stress analyses with cross correlation technique
• Chemical analyses with EDS, WDS and μ-XRF
• Chemical depth profile with TOFSIMS
• Introduction to SEM in-situ technique: in-situ diffraction; micro-mechanics; AFM; in-situ heating
• Brief introduction to TEM: TEM vs SEM for imaging and diffraction

For more information please see the flyer.

Registration